BS EN 60204-33-2011 机械安全.机械的电气设备.半导体制造设备要求
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【英文标准名称】:Safetyofmachinery.Electricalequipmentofmachines.Requirementsforsemiconductorfabricationequipment
【原文标准名称】:机械安全.机械的电气设备.半导体制造设备要求
【标准号】:BSEN60204-33-2011
【标准状态】:现行
【国别】:英国
【发布日期】:2011-08-31
【实施或试行日期】:2011-08-31
【发布单位】:英国标准学会(GB-BSI)
【起草单位】:BSI
【标准类型】:()
【标准水平】:()
【中文主题词】:
【英文主题词】:Definitions;Electricmachines;Electricalengineering;Electricalequipment;Fabrication;Industrialmachines;Machines;Safety;Safetyrequirements;Semiconductors;Workplacesafety
【摘要】:ThispartofIEC60204appliestoelectricalandelectronicequipmentassociatedwithsemiconductorfabricationequipmentforthemanufacture,measurement,assembly,andtestofsemiconductors.NOTE1Inthisstandard,thetermelectricalincludeselectrical,electronic,andprogrammableelectronicmatters(i.e.electricalequipmentmeanselectrical,electronic,andprogrammableelectronicequipment).NOTE2Inthecontextofthisstandard,thetermpersonreferstoanyindividualandincludesthosepersonswhoareassignedandinstructedbytheuserorhisagent(s)intheinstallation,use,andcareofthefabricationequipmentinquestion.Theelectricalequipmentcoveredbythisstandardcommencesatthepointofconnectionofthesupplytotheelectricalequipment(see5.1),andincludesproperinstructionforitssafeinstallation.NOTE3Fortherequirementsfortheelectricalsupplyinstallationinbuildings,seeIEC60364series.Thispartisapplicabletotheelectricalequipmentorpartsoftheelectricalequipmentthatoperatewithnominalsupplyvoltagesnotexceeding1000Vforalternatingcurrent(a.c.)andnotexceeding1500Vfordirectcurrent(d.c.),andwithnominalsupplyfrequenciesnotexceeding200Hz.Forhighervoltagesorfrequencies,specialrequirementsmaybeneeded.NOTE4Electricalequipmentwithinwhichderivedvoltagesexceedthesesupplyvoltagelimitsiswithinthescopeofthisstandard.Includedarerequirementsforprotectivemeasuresagainstelectricalsafetyhazardsaswellaselectricalinterlockcircuitsthatprotectagainstnon-electricalhazards.However,itdoesnotcoveralltherequirementsthatareneededorrequiredbyotherstandardsorregulationsinordertosafeguardpersonsfromhazardsotherthanelectricalhazards(e.g.chemicalhazards,mechanicalhazards,radiationhazards).Eachtypeofmachinehasuniquerequirementstobeaccommodatedtoprovideadequatesafety.Additionalandspecialrequirementscanapplytotheelectricalequipmentoffabricationequipmentthat:?use,process,orproducepotentiallyexplosivematerial;?areusedinpotentiallyexplosiveand/orflammableatmospheres;?havespecialriskswhenproducingorusingcertainmaterials;?arehoistingmachines(whicharecoveredbyIEC60204-32).Thisstandarddoesnotincludespecificationsforperformanceorfunctionalcharacteristicsofthefabricationequipment.Thisstandarddoesnotdealwiththepossibleeffectsonhumanhealththatcanresultfromemissions(forexampleEMFs,noise)fromthefabricationequipment.Thisstandarddoesnotspecifyrequirementsforelectromagneticcompatibility(EMC).
【中国标准分类号】:C68
【国际标准分类号】:13_110;25_040_30;29_020
【页数】:130P.;A4
【正文语种】:英语
【原文标准名称】:机械安全.机械的电气设备.半导体制造设备要求
【标准号】:BSEN60204-33-2011
【标准状态】:现行
【国别】:英国
【发布日期】:2011-08-31
【实施或试行日期】:2011-08-31
【发布单位】:英国标准学会(GB-BSI)
【起草单位】:BSI
【标准类型】:()
【标准水平】:()
【中文主题词】:
【英文主题词】:Definitions;Electricmachines;Electricalengineering;Electricalequipment;Fabrication;Industrialmachines;Machines;Safety;Safetyrequirements;Semiconductors;Workplacesafety
【摘要】:ThispartofIEC60204appliestoelectricalandelectronicequipmentassociatedwithsemiconductorfabricationequipmentforthemanufacture,measurement,assembly,andtestofsemiconductors.NOTE1Inthisstandard,thetermelectricalincludeselectrical,electronic,andprogrammableelectronicmatters(i.e.electricalequipmentmeanselectrical,electronic,andprogrammableelectronicequipment).NOTE2Inthecontextofthisstandard,thetermpersonreferstoanyindividualandincludesthosepersonswhoareassignedandinstructedbytheuserorhisagent(s)intheinstallation,use,andcareofthefabricationequipmentinquestion.Theelectricalequipmentcoveredbythisstandardcommencesatthepointofconnectionofthesupplytotheelectricalequipment(see5.1),andincludesproperinstructionforitssafeinstallation.NOTE3Fortherequirementsfortheelectricalsupplyinstallationinbuildings,seeIEC60364series.Thispartisapplicabletotheelectricalequipmentorpartsoftheelectricalequipmentthatoperatewithnominalsupplyvoltagesnotexceeding1000Vforalternatingcurrent(a.c.)andnotexceeding1500Vfordirectcurrent(d.c.),andwithnominalsupplyfrequenciesnotexceeding200Hz.Forhighervoltagesorfrequencies,specialrequirementsmaybeneeded.NOTE4Electricalequipmentwithinwhichderivedvoltagesexceedthesesupplyvoltagelimitsiswithinthescopeofthisstandard.Includedarerequirementsforprotectivemeasuresagainstelectricalsafetyhazardsaswellaselectricalinterlockcircuitsthatprotectagainstnon-electricalhazards.However,itdoesnotcoveralltherequirementsthatareneededorrequiredbyotherstandardsorregulationsinordertosafeguardpersonsfromhazardsotherthanelectricalhazards(e.g.chemicalhazards,mechanicalhazards,radiationhazards).Eachtypeofmachinehasuniquerequirementstobeaccommodatedtoprovideadequatesafety.Additionalandspecialrequirementscanapplytotheelectricalequipmentoffabricationequipmentthat:?use,process,orproducepotentiallyexplosivematerial;?areusedinpotentiallyexplosiveand/orflammableatmospheres;?havespecialriskswhenproducingorusingcertainmaterials;?arehoistingmachines(whicharecoveredbyIEC60204-32).Thisstandarddoesnotincludespecificationsforperformanceorfunctionalcharacteristicsofthefabricationequipment.Thisstandarddoesnotdealwiththepossibleeffectsonhumanhealththatcanresultfromemissions(forexampleEMFs,noise)fromthefabricationequipment.Thisstandarddoesnotspecifyrequirementsforelectromagneticcompatibility(EMC).
【中国标准分类号】:C68
【国际标准分类号】:13_110;25_040_30;29_020
【页数】:130P.;A4
【正文语种】:英语
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